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		<title>Production and control of hollow cathode and high voltage glow discharge plasmas for ion implantation and deposition inside metallic tubes</title>
		<year>2016</year>
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		<author>Ueda, Mário,</author>
		<author>Silva, Carla da,</author>
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		<affiliation>Instituto Nacional de Pesquisas Espaciais (INPE)</affiliation>
		<electronicmailaddress>mario.ueda@inpe.br</electronicmailaddress>
		<electronicmailaddress>carla.silva@inpe.br</electronicmailaddress>
		<conferencename>Congresso Brasileiro de Aplicações de Vácuo na Indústria e na Ciência, 38 (CBrAVIC)</conferencename>
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